Perspectives of modern metrology
نویسندگان
چکیده
منابع مشابه
Modern Approaches in Phase Measuring Metrology
The measurement accuracy of an interferometric optical test is generally limited by the environment. This paper discusses two single-shot interferometric techniques for reducing the sensitivity of an optical test to vibration; simultaneous phase-shifting interferometry and a special form of spatial carrier interferometry utilizing a micropolarizer phase-shifting array. In both techniques averag...
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ژورنال
عنوان ژورنال: Mechanik
سال: 2019
ISSN: 0025-6552
DOI: 10.17814/mechanik.2019.12.106